OTF-1200X-RTP-II Two Zones Furnace for CSS Thermal Evaporation Processing

Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame

The chamber is made of high purity fused quartz tube

Quartz tube size: 11" OD/10.8" ID x 9" H

The vacuum flanges are made of Stainless Steel 316

Overall dimension: 850(L)×745(W)×1615(H) mm

Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily

Bottom flange has one KFD-25 vacuum port with right-angle valve and two gas inlets (1/4" pipe required) with needle valves

Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump (vacuum pump is not included, please order separately)

One digital vacuum gauge is installed on the top flange

16 -160 mL/m

400 - 4000 mL/m (for purging purpose)

Two shortwave IR lamps as heating elements

The distance between two heaters is adjustable from 10 - 50 mm

The heaters are installed in the water cold jacket to reduce heat radiation and allow for fast cooling

Water cold jacket is made of SS316 with PTFE fitting

3" round wafer holder is built in with top heater to load substrate

One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of substrate to make it heated uniformly

One 3" graphite crucible can be put on the bottom heater to load evaporating materials        

Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters

Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken

PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below

Max. temperature for each heaters: <= 650ºC

Max. temperature difference between two heaters: <= 300ºC depends on spacing between two heaters:

Heating: > 8ºC/s ( heating single heater only )

Cooling: > 10ºC/s (600 - 100ºC) Max.

One vacuum pump is required. Please order separately by click the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump

If you run corrosive gas, please consider to use anti-corrosive dry pump is shown in the second picture from the left below (EQ-DP250) at extra cost

You may order a recirculating water chiller for saving water source separately

You may choose digital MFC gas deliver system by click the first picture from the right below

CE Certified

UL / MET / CSA Certification is available upon request, additional charges will apply

Temperature controller is MET and CE Certified

The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)

Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Please read article: High efficiency  CSS CdTe Solar Cell

UCLA researchers improve process for manufacturing highly efficient solar cells

Planar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process

Sub 150 °C Processed Meso-superstructured Perovskite Solar Cells with Enhanced Efficiency

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